Interaction study of nitrogen ion beam with silicon-Reference-Cited by-同舟云学术

Interaction study of nitrogen ion beam with silicon

Published:2017-05 Issue:3 Volume:35 Page:03D101
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Schmidt Marek E.,Zhang Xiaobin,Oshima Yoshifumi,Anh Le The,Yasaka Anto¹,Kanzaki Teruhisa,Muruganathan Manoharan,Akabori Masashi,Shimoda Tatsuya,Mizuta Hiroshi²

Affiliation:

1. Hitachi High-Tech Science Corporation, 36-1 Takenoshita, Oyama-cho 410-1393, Japan and School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi 923-1292, Japan

2. School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi 923-1292, Japan; Nano Research Group, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom; and Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM, 43600 Bangi, Selangor, Malaysia

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4977566

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