Sputtered thin film piezoelectric aluminium nitride as a functional MEMS material and CMOS compatible process integration
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference9 articles.
1. F. Stoppel, C. Schröder, B. Wagner, W. Benecke. AlN-based piezoelectric micropower generator for ambient vibration energy harvesting. Proceedings of Eurosensors XXV, Athen: Elsevier B. V.; 2011.
2. H.J. Quenzer, U. Drechsler, A. Sebastian, S. Marauska, B. Wagner, M. Despont. Fabrication of Condcuting AFM Cantilevers with Integrated Piezoelectric Actuation and Sensing. Proceedings of Eurosensors XXV, Athen: Elsevier B. V.; 2011.
3. Low damping resonant magnetoelectric sensors;Greve;Appl. Phys. Lett.,2010
4. Thickness dependence of properties of highly c-axis textured AlN thin films;Martin;J. Vac. Sci. Technol. A,2004
5. PZT thin films for microsensors and actuators: Where do we stand?;Muralt;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2000
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