Thickness dependence of the properties of highlyc-axis textured AlN thin films-Reference-Cited by-同舟云学术

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Thickness dependence of the properties of highlyc-axis textured AlN thin films

Published:2004-03 Issue:2 Volume:22 Page:361-365
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Martin F.,Muralt P.,Dubois M.-A.,Pezous A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1649343

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