Design and optimization of planar structure micro-hotplate-Reference-Cited by-同舟云学术

Design and optimization of planar structure micro-hotplate

Published:2011 Issue: Volume:12 Page:105-110
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Zhang Zili,Yin Chenbo,Tao Chunmin,Zhu Bin,Dong Ningning

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference5 articles.

1. Thermal and gas-sensing properties of planar-type micro gas sensor;Chung;Sens. Actuat. B,2000

2. Silicon-basde micro-gas sensors for detecting formaldehyde;Wang;Sens. Actuat. B,2009

3. Significance of electrode-spacing in hydrogen detection for tin oxidebased MEMS sensor;Shukla;Int. J. Hydrogen Energy,2008

4. C. M. Tao, C. B. Yin, M. X. He, S. D. Tu, Thermal Analysis And Design of a Micro-Hotplate for Sisubstrated Microstructural Gas Sensor, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, p 284-287, 2008, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008.

5. Thermal analysis and design of a micro- hotplate for integrated gas-sensor applications;Fung;Sens. Actuators A,1996

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2. Simulation and Optimization of a Planar-Type Micro-Hotplate with Si3N4-SiO2 Transverse Composite Dielectric Layer and Annular Heater;Micromachines;2022-04-12

3. A microscale formaldehyde gas sensor based on Zn2SnO4/SnO2 and produced by combining hydrothermal synthesis with post-synthetic heat treatment;Journal of Materials Science;2013-10-22

4. Optimizing Design of a New Micro-Structural Gas Sensor;Advanced Materials Research;2013-06

5. Design, Simulation and Optimization of a New Micro-Structural Gas Sensor;Advanced Materials Research;2013-03