Design, Simulation and Optimization of a New Micro-Structural Gas Sensor

Abstract

Micro-structural gas sensor with a new kind of electrode is designed. Platinum filament is selected as gold electrodes, and SiO2 is used as the thermal and electricity insulation layer. The simulation results of ANSYS reveal that when the thickness of SiO2, thickness of Si substrate, electrode with and electrode space are 50, 250, 15 and 60 µm, respectively, the sensors can own higher temperature and uniform temperature distributing in the center. The magnetic field distribution is also analyzed by ANSYS, and the results show that the new electrodes can eliminate magnetic field from the heater on the measuring signal interference, which is benefit for the improvement of sensor performance.