Low Power Closed-loop Driving Circuit for Piezoelectric Microscanners Based on Tuneable Capacitive Position Sensors
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference8 articles.
1. D. McCormick, W. Jung, Y.-C. Ahn, Z. Chen, N. Tien, A three dimensional real-time MEMS based optical biopsy system for in-vivo clinical imaging, in: Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, 2007, pp. 203-208.
2. High-q mems resonators for laser beam scanning displays;Hofmann;Micromachines,2012
3. V. Milanovic, A. Kasturi, N. Siu, M. Radojicic, Y. Su, “MEMSeye” for optical 3D tracking and imaging applications, in: Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International, 2011, pp. 1895-1898.
4. Electromagnetic two-dimensional scanner using radial magnetic field;Ji;J. Microelectromech. Syst.,2007
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