A time division capacitive feedback method of electrostatic MEMS mirror driven by PWM signal-Reference-Cited by-同舟云学术

A time division capacitive feedback method of electrostatic MEMS mirror driven by PWM signal

Published:2021-05 Issue: Volume:322 Page:112631
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Xia Changfeng^ORCID,Qiao Dayong^ORCID,Song Xudong^ORCID,Song Xiumin,Zheng Wenhui,He Yaojun,Wu Banghua

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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