Author:
Meinel Katja,Stoeckel Chris,Melzer Marcel,Zimmermann Sven,Forke Roman,Hiller Karla,Otto Thomas
Funder
European Union
Sächsische Aufbaubank SAB
Free State of Saxony, Federal Ministry for Economic Affairs and Energy
Fraunhofer Gesellschaft for funding the work within the projects “PI MEMS Control”
research group “E-PISA”
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
25 articles.
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