Author:
Chaudhuri A. Ray,Severi S.,Erismis M.A.,Francis L.A.,Witvrouw A.
Reference5 articles.
1. Yazdi.N, Ayazi.F, Najafi.K, “Micromachined inertial sensors” Proceedings of the IEEE, vol. 86, NO. 8, August 1998.
2. G. Langfelder et al “MEMS Motion Sensors Based on the Variations of the Fringe Capacitances” IEEE Sensors Journal (2011),Volume: 11, Issue: 4, Pages: 1069-1077.
3. http://www.coventor.com/products/coventorware/
4. http://inst.eecs.berkeley.edu/∼ee245/fa11/solutions/EE245_Fall_2011_HW1_Solutions_Final_2.pdf.
5. A. Witvrouw, CMOS-MEMS Integration Today and Tomorrow, Viewpoint set no. 44” The Materials for MEMS’, Scripta Materialia, Volume 59, Issue 9, pp. 945-949 (2008).
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