CMOS–MEMS integration today and tomorrow
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,Mechanics of Materials,Metals and Alloys,Mechanical Engineering
Reference33 articles.
1. Why CMOS-integrated transducers? A review
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3. J. Smith et al., in: Proc. IEDM, 1995, pp. 609–612.
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