Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference3 articles.
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2. Albero J et al, Micromachined array-type Mireau interferometer for parallel inspection of MEMS, J. Micromechanics and .Microengenieering,;1; 2010, Vol. 21, No.4, 5012.
3. Jia C, et al, A Hierarchic Bonding Procedure for the Assembly of Micro Confocal Microscope, Proc. 3rd IEEE International .Workshop;1; on Low Temperature Bonding for 3D Integration, Tokyo, May 22-23, 2012.
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