On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection-Reference-Cited by-同舟云学术

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On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

Published:2007-06 Issue: Volume: Page:
ISSN:
Container-title:TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
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Author:

Gorecki C.,Nieradko L.,Bargiel S.,Dziuban J.,Henis D.,Sylvestre J.A.,Alkowska K.,Soto-Romero G.,Thevenet J.,Yahiaoui R.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4300055/4300056/04300694.pdf?arnumber=4300694

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System;IEEE Photonics Technology Letters;2013-08

2. Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses;Procedia Engineering;2012

3. A Millimeter-Tunable-Range Microlens for Endoscopic Biomedical Imaging Applications;IEEE Journal of Quantum Electronics;2010-09

4. Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens;Procedia Engineering;2010

5. Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications;SPIE Proceedings;2009-05-20

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