Simple method based on intensity measurements for characterization of aberrations from micro-optical components-Reference-Cited by-同舟云学术

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Simple method based on intensity measurements for characterization of aberrations from micro-optical components

Published:2015-10-21 Issue:31 Volume:54 Page:9060
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Perrin Stephane,Baranski Maciej,Froehly Luc,Albero Jorge,Passilly Nicolas,Gorecki Christophe

Funder

Agence Nationale de la Recherche (L’ Agence Nationale de la Recherche)

European Commission (EC)

Publisher

The Optical Society

Reference26 articles.

1. Micromachined array-type Mirau interferometer for parallel inspection of MEMS

2. Arrays of millimeter-sized glass lenses for miniature inspection systems

3. Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses

4. Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques

5. Design, fabrication and testing of microlens arrays for sensors and microsystems

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization;Applied Optics;2020-04-16

2. Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components;Micromachines;2019-03-13

3. Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation;Biomedical Optics Express;2019-02-07

4. Wafer-level fabrication of arrays of glass lens doublets;Micro-Optics 2016;2016-04-27

5. Aberration retrieval for the characterization of micro-optical components;SPIE Proceedings;2016-04-26

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