High Resolution Nano-gap Pirani Sensor for Pressure Measurement in Wide Dynamic Range Operation Around Atmospheric Pressure-Reference-Cited by-同舟云学术

High Resolution Nano-gap Pirani Sensor for Pressure Measurement in Wide Dynamic Range Operation Around Atmospheric Pressure

Published:2016 Issue: Volume:168 Page:798-801
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Claudel Julien,Ghouila-Houri Cecile,Gerbedoen Jean-Claude,Gallas Quentin,Garnier Eric,Merlen Alain,Elmazria Omar,Viard Romain,Talbi Abdelkrim,Pernod Philippe

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference9 articles.

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2. Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm;Shahiri-Tabarestani;in 2012 International Conference on Biomedical Engineering (ICoBE),2012

3. A miniature Fabry-Perot pressure sensor for intracranial pressure measurement;Li;in 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),2014

4. Silicon nanowire based Pirani sensor for vacuum measurements;Brun;Appl. Phys. Lett.,2012

5. Wide vacuum pressure range monitoring by pirani SAW sensor;Nicolay;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2010

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