Silicon nanowire based Pirani sensor for vacuum measurements
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4765665
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4. An Improved Physical Model Considering Mirco-Nano Scale Effects for Numerical Simulation of Pirani Vacuum Gauges;IEEE Electron Device Letters;2022-11
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