Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference47 articles.
1. High-K materials and metal gates for CMOS applications;Robertson;Mater. Sci. Eng. R Rep.,2015
2. Technology for sub-50nm DRAM and NAND flash manufacturing;Kim;Tech. Dig. - Int. Electron Devices Meet. IEDM.,2005
3. Review and perspective on ferroelectric HfO2-based thin films for memory applications;Park;MRS Commun,2018
4. ReRAM: history, status, and future;Chen;IEEE Trans. Electron. Dev.,2020
5. Low temperature thin films for next-generation microelectronics (invited);Schmitz;Surf. Coating. Technol.,2018
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