Electrical properties and microstructure of lead zirconate titanate (PZT) thin films deposited by pulsed-laser deposition-Reference-Cited by-同舟云学术

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Electrical properties and microstructure of lead zirconate titanate (PZT) thin films deposited by pulsed-laser deposition

Published:2004-01 Issue:7 Volume:30 Page:1529-1533
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Wang Zhan Jie,Kokawa Hiroyuki,Maeda Ryutaro

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Ferroelectric thin films in microelectricmechanical systems applications;Polla;Mater. Res. Soc. Bull.,1996

2. Preparation and application of lead zirconate titanate (PZT) films deposited by hybrid process: sol–gel method and laser ablation;Tsaur;Jpn. J. Appl. Phys.,2002

3. J. Tsaur, Z.J. Wang, L. Zhang, M. Ichiki, R. Maeda, Suga, Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers, Proc. SPIE 4936 (2002) 215–224.

4. Measurements of piezoelectric coefficient of Pb(Zr,Ti)O3 thin film using a piezoelectric microcantilever;Chu;Jpn. J. Appl. Phys.,1999

5. Novel multibridge-structured piezoelectric microdevice for scanning force microscopy;Chu;J. Vac. Sci. Technol.,2000

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. First-principles investigation of carbon substitution for lead in ferroelectric lead titanate;Ferroelectrics;2016-05-18

2. Tailoring the dielectric properties of pyrochlore free lead zirconium titanate by synthesising it through different synthesis routes;The Journal of Engineering;2014-05

3. Aluminum-doped zinc oxide electrode for robust (Pb,La)(Zr,Ti)O3 capacitors: effect of oxide insulator encapsulation and oxide buffer layer;Journal of Materials Science: Materials in Electronics;2014-03-12

4. Influence of processing conditions on the structure, composition and ferroelectric properties of sputtered PZT thin films on Ti-substrates;Applied Surface Science;2014-01

5. Electrical Properties of Sol-Gel Derived PbLaZrTiOx Capacitors with Nonnoble Metal Oxide Top Electrodes;ECS Transactions;2013-04-01

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