Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers-Reference-Cited by-同舟云学术

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Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers

Published:2002-11-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
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Author:

Tsaur Jiunn-Jye,Wang Zhanjie,Zhang Lulu,Ichiki Masaaki,Maeda Ryutaro,Suga Tadatomo

Publisher

SPIE

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tunability, ferroelectric and leakage studies on pulsed laser ablated (Pb 0.92 La 0.08 )(Zr 0.60 Ti 0.40 )O 3 thin films;Materials Chemistry and Physics;2018-06

2. Electrical Properties and Microstructure of Lead Zirconate Titanate Thin FilmIn SituGrown by Hybrid Processing:Sol-Gel Method and Pulsed Laser Deposition;Japanese Journal of Applied Physics;2004-09-22

3. Effect of Zr/Ti Ratio on Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition;Journal of Electroceramics;2004-07

4. Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing;Journal of Crystal Growth;2004-06

5. Preparation of PZT films derived by hybrid processing for MEMS application;SPIE Proceedings;2004-04-02

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