Effect of thickness scaling on the switching dynamics of ferroelectric HfO2–ZrO2 capacitors-Reference-Cited by-同舟云学术

Effect of thickness scaling on the switching dynamics of ferroelectric HfO2–ZrO2 capacitors

Published:2022-10 Issue:19 Volume:48 Page:28489-28495
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Peng Yue^ORCID,Wang Zhe^ORCID,Xiao Wenwu,Ma Yu,Liu Fenning,Deng Xinran,Yu Xiao^ORCID,Liu Yan,Han Genquan,Hao Yue

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

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3. Switching dynamics of ferroelectric Zr-doped HfO2;Alessandri;IEEE Electron. Device Lett.,2018

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1. Tuning the ferroelectricity of Hf0.5Zr0.5O2 with alloy electrodes;Science China Information Sciences;2024-07-15

2. Effect of electrical stress on time dependent dielectric breakdown (TDDB) tolerate capability of HfO₂–ZrO₂ ferroelectric films with different thicknesses;Nanotechnology;2024-06-24

3. Enhancing ferroelectric performance in hafnia-based MFIS capacitor through interface passivation and bulk doping;Nanotechnology;2024-03-20

4. HfO₂–ZrO₂ Ferroelectric Capacitors with Superlattice Structure: Improving Fatigue Stability, Fatigue Recovery, and Switching Speed;ACS Applied Materials & Interfaces;2024-01-03

5. A Comparative Study on the Polarization, Reliability, and Switching Dynamics of HfO₂-ZrO₂-HfO₂ and ZrO₂-HfO₂-ZrO₂ Superlattice Ferroelectric Films;IEEE Transactions on Electron Devices;2023-04