A Comparative Study on the Polarization, Reliability, and Switching Dynamics of HfO2-ZrO2-HfO2 and ZrO2-HfO2-ZrO2 Superlattice Ferroelectric Films-Reference-Cited by-同舟云学术

A Comparative Study on the Polarization, Reliability, and Switching Dynamics of HfO₂-ZrO₂-HfO₂ and ZrO₂-HfO₂-ZrO₂ Superlattice Ferroelectric Films

Published:2023-04 Issue:4 Volume:70 Page:1802-1807
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Li Kaixuan¹^ORCID,Peng Yue¹^ORCID,Xiao Wenwu²^ORCID,Liu Fenning¹,Zhang Yueyuan¹,Feng Ze³,Dong Hong³,Liu Yan¹^ORCID,Hao Yue¹^ORCID,Han Genquan¹^ORCID

Affiliation:

1. School of Microelectronics, Xidian University, Xi’an, China

2. Xi’an UniIC Semiconductors Company Ltd, Xi’an, China

3. Key Laboratory of Photoelectronic Thin Film Devices and Technology of Tianjin, Nankai University, Tianjin, China

Funder

National Key Research and Development Project

National Natural Science Foundation of China

Major Scientific Research Project of Zhejiang Laboratory

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/10081247/10061541.pdf?arnumber=10061541

Reference30 articles.

1. HfO2-ZrO2 Superlattice Ferroelectric Capacitor With Improved Endurance Performance and Higher Fatigue Recovery Capability

2. Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes

3. A comprehensive study on the mechanism of ferroelectric phase formation in hafnia-zirconia nanolaminates and superlattices

4. Demonstration of low EOT gate stack and record transconductance on Lg = 90 nm nFETs using 1.8 nm ferroic HfO2-ZrO2 Su-perlattice;li;IEDM Tech Dig,2022

5. Structural and dielectric properties of crystalline and amorphous ZrO2

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1. Optimization of ferroelectricity and endurance of hafnium zirconium oxide thin films by controlling element inhomogeneity;Journal of Advanced Ceramics;2024-07

2. Switching Dynamics of HfO₂–ZrO₂ Nanolaminates With Different Laminate Thicknesses;IEEE Transactions on Electron Devices;2024-06

3. Sub-10 nm HfZrO ferroelectric synapse with multiple layers and different ratios for neuromorphic computing;Nanotechnology;2023-10-05