Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition-Reference-Cited by-同舟云学术

Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition

Author:

Lee Yujin,Seo Seunggi,Oh Il-Kwon,Lee Sanghun,Kim Hyungjun

Funder

Materials and Components Technology Development Program of MOTIE/KEIT

National Research Foundation of Korea (NRF)

Korea government (MSIT)

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference40 articles.

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