Investigation on the control effect of benzotriazole and two derivatives on cobalt pitting corrosion in chemical mechanical polishing process: A combination of experiments and theoretical simulations

Author:

Ji Jinbo,Tan Baimei,Zhang Shihao,Ma Tengda,Guo Lei,Li Wei,Yan Mei,Wang Fangyuan,Du Haoyu,Wang Xiaolong

Funder

Natural Science Foundation of Hebei Province

Natural Science Foundation of Jiangsu Province

National Science and Technology Major Project

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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4. Effect of Potassium Tartrate on Removal Rate Selectivity of Co/TiN/TEOS for Cobalt “Buff Step” Chemical Mechanical Planarization;Cheng;ECS J. Solid State Sc.,2020

5. Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI;Zhou;Appl. Surf. Sci.,2020

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