Influence of nitrogen doping on thermal stability of fluorinated amorphous carbon thin films-Reference-Cited by-同舟云学术

Influence of nitrogen doping on thermal stability of fluorinated amorphous carbon thin films

Published:2006-02 Issue:1 Volume:16 Page:54-58
ISSN:1003-6326
Container-title:Transactions of Nonferrous Metals Society of China
language:en
Short-container-title:Transactions of Nonferrous Metals Society of China

Author:

LIU Xiong-fei,ZHOU Xin,GAO Jin-ding

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Geotechnical Engineering and Engineering Geology,Condensed Matter Physics

Reference17 articles.

1. Amorphous fluorocarbon polymer films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor 1: Deposition, morphology, structural and chemical properties;BILOIU;J Vac Sci Technol,2000

2. Plasma deposition of low-dielectric- constant fluorinated amorphous carbon;ENDO;J Appl Phys,1999

3. Deposition temperature effect on thermal stability of fluorinated amorphous carbon films utilized as low-K dielectrics;ARIEL;Materials Science in Semiconductor Processing,2001

4. Influence of thermal annealing on bonding structure and dielectric properties of fluorinated amorphous carbon film;Zhao-yuan;Current Applied Physics,2002

5. Annealing effects on structural and electrical properties of fluorinated amorphous carbon films deposited by plasma enhanced chemical vapor deposition;Yi;Thin Solid Films,2003

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of Nitrogen on Hydrogenated Amorphous Carbon Thin Films Deposited by Plasma Focus Device;Journal of Fusion Energy;2018-02-01

2. Investigation of Structural and Electronic Environments of Nitrogen-Doped CVD-Grown DLC Films;Lecture Notes in Electrical Engineering;2017-10-29

3. Effect of Nitrogen Doping on the Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Films;Japanese Journal of Applied Physics;2013-09-01

4. The OFF to ON switching time and ON state consolidation in write-once-read-many-times memory devices based on doped and undoped carbon-sphere/polymer composites;Thin Solid Films;2012-04

5. Improvement in lifetime and replication quality of Si micromold using N:DLC:Ni coatings for microfluidic devices;Sensors and Actuators B: Chemical;2010-09