Proposal of new mixture target for PZT thin films by reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference7 articles.
1. Preparation and Characterization of Pb(ZrxTi1-x)O3Thin Films by Reactive Sputtering Using an Alloy Target
2. Epitaxial lead zirconate‐titanate thin films on sapphire
3. Integrated sol-gel PZT thin-films on Pt, Si, and GaAs for non-volatile memory applications
4. Ferroelectric properties of lead‐zirconate‐titanate films prepared by laser ablation
5. Low-Temperature Fabrication of Pb(Zr,Ti)O3Films by RF Reactive Sputtering Using Zr/Ti + PbO Target
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3. Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains;ACS Applied Materials & Interfaces;2017-03-08
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