Author:
Seino T,Kawakubo Y,Nakajima K,Kamei M
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference5 articles.
1. High Conducting Large Area Indium Tin Oxide Electrodes for Displays Prepared by DC Magnetron Sputtering
2. Large area deposition: Sputtering- and PCVD-systems and techniques for LCD
3. Chapman, B.N., Glow Discharge Processes. John Wiley & Sons, Inc., New York, 1980, p. 248
4. The design and performance of planar magnetron sputtering cathodes
5. Rossnagel, S.M., Cuomo, J.J. and Westwood, W.D., in Handbook of plasma processing technology. NOYES PUBLICATIONS, New Jersey, 1990, p. 30
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献