The energy distributions of major ions in the cathode zone of a strongly abnormal nitrogen DC glow discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Experimental and simulated XPS depth profiles of low-energy high dose nitrogen implanted into aluminium
2. Energy distribution of heavy particles generated in the cathode fall of a gas mixture glow discharge
3. Collision Phenomena in Ionized Gases;McDaniel,1964
4. Cross section for single and double ionization of N2 and O2 molecules by electron impact from threshold up to 170 eV
5. A special grow discharge source of positive ions
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Generation and Distribution of Fast Atomic Species(N+, Nf) in Nitrogen Glow Discharge;Plasma Science and Technology;2006-11
2. The role of ions(N＋２) in the dissociation of nitrogen in a direct-current glow discharge;Acta Physica Sinica;2003
3. Monte Carlo simulation of fast electrons and heavy particles in the CDS of nitrogen dc glow discharge;Journal of Physics D: Applied Physics;2001-11-20
4. Atomic force microscopy and high-resolution RBS investigation of the surface modification of magnetron sputter-etched Si(111) in an argon plasma at different pressures;Surface and Interface Analysis;1999-10
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