A special grow discharge source of positive ions
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference8 articles.
1. A glow discharge ion gun for etching
2. The operation of a glow discharge ion gun used for specimen thinning
3. 1.14 Energy distribution of the ions produced by saddle field ion sources
4. Measurement of the sputtering yield for Ar+ and Ar2+ ions on gold films
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1. The energy distributions of major ions in the cathode zone of a strongly abnormal nitrogen DC glow discharge;Vacuum;1998-02
2. Energy distribution of heavy particles generated in the cathode fall of a gas mixture glow discharge;Journal of Physics D: Applied Physics;1994-03-14
3. Energy distributions of cathode fall ions in the light of Boltzmann equation;Vacuum;1990-01
4. Energy distributions of molecular gas ions generated in a special glow-discharge source;Vacuum;1989-01
5. Energy distributions of oxygen and argon ions generated in a special glow-discharge source;Vacuum;1988-01
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