Spatially resolved optical emission spectroscopy of the secondary glow observed during biasing of a microwave plasma
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference26 articles.
1. Growth and characterization of diamond films on nondiamond substrates for electronic applications
2. Effects of electric field on the growth of diamond by microwave plasma CVD
3. Characterization of bias-enhanced nucleation of diamond on silicon byinvacuosurface analysis and transmission electron microscopy
4. Epitaxial nucleation of diamond on β-SiC via bias-enhanced microwave plasma chemical vapor deposition
5. Textured growth of diamond on silicon viain situcarburization and bias‐enhanced nucleation
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4. Gas composition at the substrate in MW-CVD diamond growth: An old problem revisited;Diamond and Related Materials;2005-09
5. In situ optical characterization during MPACVD diamond film growth on silicon substrates using a bichromatic infrared pyrometer under oblique incidence;Journal of Physics D: Applied Physics;2001-03-20
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