Quantitative analysis of a-Si1−xCx:H thin films by vibrational spectroscopy and nuclear methods-Reference-Cited by-同舟云学术

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Quantitative analysis of a-Si1−xCx:H thin films by vibrational spectroscopy and nuclear methods

Published:2001-05 Issue:2-4 Volume:61 Page:303-308
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Gracin D,Bogdanović I,Borjanović V,Jakšić M,Pastuović Ž,Dutta J.M,Vlahović B,Nemanich R.J

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference14 articles.

1. Quantitative analysis of a-Si1−xCx:H thin films

2. Elastic recoil detection analysis using ion-induced electron emission for particle identification

3. A new setup for elastic recoil analysis using ion induced electron emission for particle identification

4. Mayer M. Technical Report IPP 9/133, Max-Planck-Institut für Plasmaphysik, Garching, Germany. 1977.

5. Vibrational Spectra of Hydrogen in Silicon and Germanium

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. FTIR analysis of a-SiCN:H films deposited by PECVD;Vacuum;2013-12

2. Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy;Journal of Non-Crystalline Solids;2011-11

3. Measurement and Analysis of Composition and Depth Profile of H in Amorphous Si 1− x C x :H Films;Chinese Physics Letters;2008-07

4. XRR and SAXS Study of Hydrogenated Amorphous Silicon Oxycarbide (a-SiOC:H) Films;Materials Science Forum;2007-10

5. Transport studies of carbon-rich a-SiCx:H film through admittance and deep-level transient spectroscopy measurements;Philosophical Magazine;2006-07

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