Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition-Reference-Cited by-同舟云学术

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Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition

Published:2000-10 Issue:1 Volume:59 Page:159-167
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Miyano R.,Kimura K.,Izumi K.,Takikawa H.,Sakakibara T.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference13 articles.

1. Macroparticles in films deposited by steered cathodic arc

2. Synthesis of anatase TiO2 film by reactive vacuum arc deposition method

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