Macroparticles in films deposited by steered cathodic arc
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/29/i=7/a=041/pdf
Reference46 articles.
1. Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient
2. Hard coatings of TiN, (TiHf)N and (TiNb)N deposited by random and steered arc evaporation
3. Study of electrode products emitted by vacuum arcs in form of molten metal particles
4. Components of cathode erosion in vacuum arcs
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