Author:
Shinno H,Ishioka K,Kitajima M
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Anders A, editor. Handbook of plasma immersion ion implantation and deposition, New York: Wiley, 2000. p. 393–398, 570–571.
3. Operating characteristics of a 100 kV, 100 kW plasma ion implantation facility
4. Schumacher RW, Matossian JN, Goebel DM. US patent 5,607,509, Hughes Electronics, Los Angeles, CA, 1997.
5. Plasma-Immersion Ion Implantation
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