Ignition and dynamics of high-voltage glow discharge plasma implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference18 articles.
1. Deposition of carbon films by plasma-based ion implantation using glow discharge plasma ignited by high voltage pulses applied to substrates
2. Plasma source ion‐implantation technique for surface modification of materials
3. Plasma immersion ion implantation—a fledgling technique for semiconductor processing
4. Handbook of Plasma Immersion Ion Implantation and Deposition,2000
5. Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma
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