Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference6 articles.
1. High-Energy Neutral Atoms in the Sputtering of ZnO
2. Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3
3. High-Energy Oxygen Atoms in ZnO Film Preparation by Reactive Sputtering of Zn
4. Heteroepitaxial growth of YSZ films on Si(100) substrate by using new metallic mode of reactive sputtering
5. Yttria-stabilized zirconia (YSZ) heteroepitaxially grown on Si substrates by reactive sputtering
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study of the properties of zirconia nanoparticles/zinc oxide films composites: Comparation to thermally treated samples;Results in Chemistry;2023-12
2. The measurement and impact of negative oxygen ions during reactive sputter deposition;Critical Reviews in Solid State and Materials Sciences;2023-09-21
3. Mathematical model depicting the deposition kinetics process into rf-magnetron co-sputtering of strontium barium titanate thin films;Digest Journal of Nanomaterials and Biostructures;2022-01
4. Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe;Vacuum;2021-12
5. Deposition Condition at Low Temperature for Crystallization Enhancement of YSZ Films on Glass Substrates by Reactive Sputtering;2020 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD);2020-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3