XRD and AES characterization of TiOxNy thin films grown by ion assisted deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference9 articles.
1. Chemical composition of TiNxOy solar selective absorbers
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1. Effect of O/N content on the phase, morphology, and optical properties of titanium oxynitride thin films;Journal of Materials Science;2023-07
2. Transparent conductive properties of TiON thin films;Journal of Vacuum Science & Technology A;2022-01
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4. A study on the characteristics of TiOxNy thin films with various nitrogen flow rate by PECVD method;Current Applied Physics;2012-12
5. Sputtering characteristics, crystal structures, and transparent conductive properties of TiOxNy films deposited on α-Al2O3(0001) and glass substrates;Applied Surface Science;2012-12
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