Control strategy of fan filter units based on personnel position in semiconductor fabs-Reference-Cited by-同舟云学术

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Control strategy of fan filter units based on personnel position in semiconductor fabs

Published:2022-09 Issue: Volume:223 Page:109420
ISSN:0360-1323
Container-title:Building and Environment
language:en
Short-container-title:Building and Environment

Author:

Zhao Jiaan,Liang Chenjiyu,Wang Huan,Li Xianting,Xu Wei

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Ministry of Science and Technology of the People's Republic of China

Publisher

Elsevier BV

Subject

Building and Construction,Geography, Planning and Development,Civil and Structural Engineering,Environmental Engineering

Reference39 articles.

1. From Catching Up to Forging Ahead: China’s Policies for Semiconductors;Ernst,2014

2. Government Incentives and US Competitiveness in Semiconductor Manufacturing;Varas,2020

3. History of cleanrooms;Naughton;ASHRAE J.,2019

4. ASHRAE Design Guide for Cleanrooms:Fundamentals,System,and Performance,2017

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4. The research on the particle concentration distribution of directed airflow in cleanrooms for operators;PLOS ONE;2024-03-01

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