Author:
Härkönen J.,Tuominen E.,Lassila-Perini K.,Palokangas M.,Yli-Koski M.,Ovchinnikov V.,Heikkilä P.,Palmu L.,Kallijärvi S.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. The CMS Technical proposal CERN/LHCC 94-38.
2. ATLAS, Technical proposal CERN/LHCC 94-43.
3. Handbook of Semiconductor Wafer Cleaning Technology;Kern,1993
4. In situ barrier formation using rapid thermal annealing of a tungsten nitride/polycrystalline silicon structure
5. D.K. Schroder, Semiconductor Material and Device Characterization, John Wiley & Sons, USA, 2nd edn., 1998.
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