Effects of ion implantation on surface composition and enhanced etching in LiNbO3-Reference-Cited by-同舟云学术

Effects of ion implantation on surface composition and enhanced etching in LiNbO3

Published:1991-09 Issue:1 Volume:10 Page:19-24
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Tianhao Shao,Xinyuan Jiang,Wei Shang,Xiqi Feng

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference17 articles.

1. Optical properties of planar waveguides formed by He+implantation in LiNbO3

2. The fabrication of ion implanted stripe optical waveguide in LiNbO3

3. Microfabrication in LiNbO3 by ion‐bombardment‐enhanced etching

4. Solid-phase epitaxy of ion-implanted LiNbO3 for optical waveguide fabrication

5. Titanium-implanted optical waveguides in LiNbO3

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of ion energy and ion species on ion channeling inLiNbO3;Physical Review B;2008-11-12

2. Etching of Ion Irradiated LiNbO[sub 3] in Aqueous Hydrofluoric Solutions;Journal of The Electrochemical Society;2008

3. Ion beam enhanced etching of LiNbO3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-09

4. High Aspect Ratio Microstructures in LiNbO3 Produced by Ion Beam Enhanced Etching;MRS Proceedings;2005

5. Structural studies of erbium-implanted LiNbO3 single crystals;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-01