Etching of Ion Irradiated LiNbO[sub 3] in Aqueous Hydrofluoric Solutions-Reference-Cited by-同舟云学术

Etching of Ion Irradiated LiNbO[sub 3] in Aqueous Hydrofluoric Solutions

Published:2008 Issue:4 Volume:155 Page:D298
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Reinisch Jakob,Schrempel Frank,Gischkat Thomas,Wesch Werner

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Microfabrication in LiNbO3 by ion‐bombardment‐enhanced etching

2. Ion implantation into LiNbO3

3. Ion‐bombardment‐enhanced etching of LiNbO3using damage profile tailoring

4. Effects of ion implantation on surface composition and enhanced etching in LiNbO3

5. Ridged LiNbO<tex>$_3$</tex>Modulators Fabricated by a Novel Oxygen-Ion Implant/Wet-Etch Technique

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1. Effects of Ar+ irradiation on the performance of memristor based on single-crystalline LiNbO3 thin film;Journal of Materials Science: Materials in Electronics;2021-07-12

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3. Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3;Optical Materials;2015-08

4. Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation;Optics Letters;2015-06-04

5. Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-01