Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching-Reference-Cited by-同舟云学术

Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching

Published:2015-01 Issue:1 Volume:33 Page:010601
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Geiss Reinhard,Brandt Juliane,Hartung Holger,Tünnermann Andreas,Pertsch Thomas,Kley Ernst-Bernhard,Schrempel Frank

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4902087

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent progress in thin-film lithium niobate photonic crystal [Invited];Chinese Optics Letters;2024

2. 铌酸锂微纳米结构的制备与分析;Chinese Journal of Lasers;2023

3. Cost-efficient and high precision method for the assembly of LN-based photonic crystal slabs on the fiber tip for the implementation of E-field sensors;Optical Materials Express;2021-06-24

4. Integrated photonics on thin-film lithium niobate;Advances in Optics and Photonics;2021-05-03

5. Toward Highly Reliable, Precise, and Reproducible Fabrication of Photonic Crystal Slabs on Lithium Niobate;Journal of Lightwave Technology;2019-02-01