Ion beam enhanced etching of LiNbO3
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference24 articles.
1. Enhancement of the etch rate of LiNbO3 by prior bombardment with MeV O2+ ions
2. Patterning of wave guides in LiNbO3 using ion beam etching and reactive ion beam etching
3. Fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO3 for the next generation of integrated optoelectronic devices by focused ion beams (FIB)
4. Nanostructuring lithium niobate substrates by focused ion beam milling
5. Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
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