Heteroepitaxial nucleation of diamond on Si(100) via double bias-assisted hot filament chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Growth of diamond particles from methane-hydrogen gas
2. Heteroepitaxial diamond growth on (100) silicon
3. Synthesis of oriented textured diamond films on silicon via hot filament chemical vapor deposition
4. Synthesis of oriented textured diamond films on silicon via hot filament chemical vapor deposition
5. Effect of Nucleation Rate on Heteroepitaxial Diamond Growth on Si (100) via Electron-Emission-Enhanced Nucleation by Hot Filament Chemical Vapor Deposition
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