Surface tension studies of (Si, N)-containing diamond-like carbon films deposited by hexamethyldisilazane
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. The effect of PVD layer constitution on surface free energy
2. Network Modification of DLC Coatings to Adjust a Defined Surface Energy
3. Variation of the wettability of DLC-coatings by network modification using silicon and oxygen
4. Mechanical properties of a-C:H and a-C:H/SiOx nanocomposite thin films prepared by ion-assisted plasma-enhanced chemical vapor deposition
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2. Low-energy O+ ion beam induced chemical vapor deposition using hexamethyldisilane or hexamethyldisilazane for silicon dioxide film formation;AIP Advances;2021-12-01
3. Low-energy Ar+ and N+ ion beam induced chemical vapor deposition using hexamethyldisilazane for the formation of nitrogen containing SiC and carbon containing SiN films;PLOS ONE;2021-10-27
4. Effect of nitrogen doping on the microstructure and thermal stability of diamond-like carbon coatings containing silicon and oxygen;SURF COAT TECH;2021
5. Effect of nitrogen doping on the microstructure and thermal stability of diamond-like carbon coatings containing silicon and oxygen;Surface and Coatings Technology;2021-09
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