Diamond deposition in a microwave electrode discharge at reduced pressures

Author:

Bárdoš L.,Baránková H.,Lebedev Yu.A.,Nyberg T.,Berg S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Proc. of E-MRS Symp. on Amorphous Hydrogenated carbon Films;Badzian,1987

2. Microwave Discharges — Fundamentals and Applications;Gicquel,1993

3. Proc. of Int. Workshop Microwave Plasma and its Applications;Asmussen,1994

4. Development of a new microwave plasma torch and its application to diamond synthesis

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