Microstructure and structure characteristics of cubic WNx compounds
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference21 articles.
1. Characterization of low pressure chemically vapor-deposited tungsten nitride films
2. Preparation of Tungsten Nitride Film by CVD Method Using WF 6
3. Nitridation of fine grain chemical vapor deposited tungsten film as diffusion barrier for aluminum metallization
4. Metalorganic chemical vapor deposition of tungsten nitride for advanced metallization
5. New method to improve the adhesion strength of tungsten thin film on silicon by W2N glue layer
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1. Understanding the role of Pt addition on structure and thermal stability of CrWN glass molding coating in nitrogen molding atmosphere;Vacuum;2024-02
2. Modelling the strain build-up in nitrogen implanted tungsten films on silicon substrates;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-04
3. Influence of Microstructure, Composition and Morphology on Tribological Performance of WTiN Coatings Obtained by DC Magnetron Sputtering at Various Working Pressures;Journal of Materials Engineering and Performance;2020-08
4. Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate;Surface and Coatings Technology;2020-07
5. Tribological properties of nanostructured TiAlN/W2N multilayer coating produced by PVD;Wear;2019-07
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