Effect of ultrasonic elliptical vibration assistance on the surface layer defect of M-plane sapphire in microcutting

Author:

Wang Yinhui,Liang Zhiqiang,Zhao Wenxiang,Wang Xibin,Wang Hao

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

National Basic Research Program of China

Beijing Institute of Technology

Singapore Ministry of Education Academic Research Fund

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference41 articles.

1. Sapphire: Material, Manufacturing, Applications;Dobrovinskaya,2009

2. Machining processes for sapphire wafers: a literature review;Li;Proc. Inst. Mech. Eng. Part B J. Eng.,2010

3. Study of AlN based materials grown on nano-patterned sapphire substrates for deep ultraviolet led applications;Chen;Jpn. J. Appl. Phys.,2019

4. Microstructure and optical properties of GaN films on sapphire substrates;Chen;Mater. Des.,2000

5. Polishing pad aging studies on computer controlled optical surfacing finishing for large-scale sapphire optical window;Lv;In: Proceedings of the SPIE,2019

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