Author:
Park Chul Jin,Jung Sang Min,Kim Jin Hwan,Kim Il To,Shin Moo Whan
Funder
ICT Consilience Creative Program
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference38 articles.
1. The drive to miniaturization;Peercy;Nature,2000
2. Device scaling limits of Si MOSFETs and their application dependencies;Frank;Proc. IEEE,2001
3. Silicon device scaling to the sub-10-nm regime;Ieong;Science,2004
4. Integrated Nanoelectronics: Nanoscale CMOS, Post-CMOS and Allied Nanotechnologies;Khanna,2016
5. Shallow junction doping technologies for ULSI;Jones;Mater. Sci. Eng.: R: Rep.,1998
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