Shallow junction doping technologies for ULSI-Reference-Cited by-同舟云学术

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Shallow junction doping technologies for ULSI

Published:1998-10 Issue:1-2 Volume:24 Page:1-80
ISSN:0927-796X
Container-title:Materials Science and Engineering: R: Reports
language:en
Short-container-title:Materials Science and Engineering: R: Reports

Author:

Jones Erin C.,Ishida Emi

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference298 articles.

1. Ultra-large-scale integration device scaling and reliability

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