Deposition and characterization of Si-rich silicon oxide films using HMDS for integrated photonics
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference20 articles.
1. Will silicon be the photonic material of the third millenium? *
2. Size evolution and photoluminescence of silicon nanocrystallites in evaporated SiOx thin films upon thermal processing
3. Optical gain in silicon nanocrystals
4. Annealing effects on silicon-rich oxide films studied by spectroscopic ellipsometry
5. Formation and characteristics of silicon nanocrystals in plasma-enhanced chemical-vapor-deposited silicon-rich oxide
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