Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference47 articles.
1. The voltage-doping transformation: a new approach to the modeling of MOSFET short-channel effects;Skotnicki;IEEE Electron. Device Lett.,1988
2. Enabling Sub-5nm CMOS Technology Scaling Thinner and Taller!;Ryckaert,2019
3. The last silicon transistor: nanosheet devices could be the final evolutionary step for Moore's Law;Ye;IEEE Spectr.,2019
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